Aera TC FC-D980C Mass Flow Controller Cl2 458.076 SCCM w/ CA-98D9-Z Adapter Used Removed from a Novellus Concept

Removed from a Novellus Concept Two CVD Chemical Vapor Deposition System This Novellus Systems 03-10601-00 Relay PCB is used working surplus

Inventory # A-19619

Part No: 4S013-371

Removed from a Varian Semiconductor Equipment VSEA 160XP High Current Ion Implanter System

Inventory # A-15201

Aera TC FC-D980C Mass Flow Controller Cl2 458.076 SCCM w/ CA-98D9-Z Adapter Used Removed from a Novellus ConceptAera TC FC D980C Mass Flow Controller Cl2 458. 076 SCCM w CA 98D9 Z Adapter used working Inventory # AA 3204 This Aera TC FC D980C mass flow controller with adapter is used working surplus. The physical condition is good, but there are some signs of previous use and handling. This item will be removed from the main body of a Hitachi M 511E system. Specifications MFC Part No: TC FC D980C Adapter Part No: CA 98D9 Z Gas: Cl2 Range: 458. 076 SCCM Fitting: