TEL Tokyo Electron 2985-423760-W3 IFB Interface Block Cooling ACT12-300 Working img{max-width:100%} Nikon Precision 4B041-417 WT

img{max-width:100%} Nikon Precision 4B041-417 WT Voice Coil Motor VCM NSR-S306C DUV System Working

Part No: 10116-100

Aerotech Part No: ES13693-20

Inventory # CONJ-2164

Inventory # A-10705

TEL Tokyo Electron 2985-423760-W3 IFB Interface Block Cooling ACT12-300 Working img{max-width:100%} Nikon Precision 4B041-417 WTTEL Tokyo Electron 2985 423760 W3 IFB Interface Block Cooling ACT12 300 Working Part No: 2985 423760 W3 Model No: IFB COOLING ASSY Removed from a TEL Tokyo Electron Clean Track ACT12 300 300mm System Part List Assembly Part No: 2985 423760 W3 COOLING ASSY 1 2910 206753 12 BASE 1 2910 316001 12 BRACKET 1 2910 316002 12 BRACKET 1 2910 316004 14 PLATE,SIDE 2 2910 411890 11 SUPPORT 4 2910 316005 13 BASE,MIDDLE 1 2910 408621 11 PIN 3 1910 422126 13 PIN CAP